MEMS and Nanotechnology


Jennifer Hay
KLA Tencor

Nikhil Karanjgaokar
Worcester Polytechnic Institute

Frank DelRio
National Institute of Standards and Technology



We recently concluded the 17th International Symposium on MEMS and Nanotechnology. The MEMS and Nanotechnology symposium is aimed to provide a forum to foster the exchange of ideas and information among scientists and engineers who are involved in the research and analysis of the mechanics of materials, structures and devices relevant to fields of MEMS and Nanotechnology. The MEMS and Nanotechnology fields are specialized scientific areas that involve the miniaturization of conventional scale components and systems to take advantage of the inherent reduced size, weight, power and/or enhanced performance or novel functionality. The mechanics of structures and materials in these fields involves the application of principles ranging from the micron scale down to individual atoms and require the development of novel experimental tools and techniques. These principles often involve new physical and/or chemical phenomena governed by novel material laws and impart new properties to exploit. The investigation of the various factors controlling the material and structural response of components at these scales is critical in developing new applications as well as assessing their reliability and functionality under a wide range of mechanical, electrical and thermal loading conditions. Holding this symposium at the Annual Meeting of the Society for Experimental Mechanics provides a venue where state-of-the-art experimental methods can be leveraged in these endeavors.

The 18th International Symposium on Micro- and Nanomechanics (ISMAN) will include sessions titled: Emerging Microscopy Techniques, 1D & 2D Materials, Nanomechanics, Interfaces and Adhesion, MEMS Design, Energy Harvesting, and MEMS for Biomedical Applications.

Recent Activities
Update from the TD Chair

  • Next year is the 17th year for symposium.
  • New TD leadership will be voted and implemented
  • The 2016 MEMS and Nanotechnology technical division included 3 sessions with 14 papers including an excellent keynote by Dr. Oliver Pardhasaradhi from Nanomechanics, Inc. with his presentation titled: “Expanding the Use of Frequency-Specific Techniques during Nanomechanical Testing.”
  • Overall attendance has dropped each of the last few years; possibly due to the maturity of MEMS technology, a possible decline in the popularity of MEMS, and poor academic funding for topics in MEMS due to MEMS maturity. Additionally, TD leadership noted that there were a lot of nano based papers in other sessions that would have fit nicely into the sessions we had organized.
  • Future TD direction was addressed with the following initiatives
    1. An aggressive recruitment of papers is needed
    2. Hay will provide a template invitation letter for recruiting new participants
    3. A new session on 2D materials and adhesion was needed
    4. Target set for a two day symposium.
    5. Short course suggestions if needed
      • Nanoindentation
      • MEMS Design & Fabrication
      • Introduction to AFM
    6. Entire TD will focus on spreading the word and inviting new attendees for upcoming conference.