This paper introduces a new class of thermal actuators for in-plane motion, Z-shaped thermal actuators, which could be complementary to the well-established comb drives and V-shaped thermal actuators. The Z-shaped thermal actuators offer some unique advantages such as larger travel range without buckling and more design variables when compared to the V-shaped ones. The Z-shaped actuator is modeled analytically and verified by multiphysics finite element analysis. Experimental measurements of an array of Z-shaped thermal device agree very well with the finite element analysis. The average temperature in the device structure can be estimated from the electric resistivity at each actuation voltage. In addition, the quasi-static and dynamic responses of a single Z-shaped thermal actuator are measured in SEM.